Silicon micro-pore X-ray optics

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 579, Issue 2 SPEC. ISS., 2007, Pages 817-820

  Ezoe, Y ^a   Koshiishi, M ^a   Mita, M ^a   Mitsuda, K ^a   Hoshino, A ^b   Ishisaki, Y ^b   Takano, T ^c   Maeda, R ^c  

^a JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Grazing X ray optics; MEMS; Micro pore optics

Indexed keywords

MEMS; MICROPROCESSOR CHIPS; NUCLEAR PHYSICS; SPACE RESEARCH; SURFACE ROUGHNESS;

GRAZING X-RAY OPTICS; MICROPORE OPTICS; X-RAY MIRROR CHIPS;

X RAY OPTICS;

EID: 34547799737     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2007.05.301     Document Type: Article

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