Metrology for templates of UV nano imprint lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6730, Issue , 2007, Pages

  Yoshida, Kouji ^a   Kojima, Kouichirou ^a   Abe, Makoto ^a   Sasaki, Shiho ^a   Kurihara, Masaaki ^a   Mohri, Hiroshi ^a   Hayashi, Naoya ^a  

^a DAI NIPPON PRINTING CO LTD   (Japan)

Author keywords

Metrology; Nano imprint lithography; Scanning probe microscopy; Scatterometry; SEM

Indexed keywords

MEASUREMENT THEORY; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY;

CONDUCTIVE LAYERS; SCATTEROMETRY;

NANOIMPRINT LITHOGRAPHY;

LITHOGRAPHY; MEASUREMENT; SCANNING ELECTRON MICROSCOPY;

EID: 42149191552     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.746802     Document Type: Conference Paper

References (5)

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