Development of an ultra-high resolution diffraction grating for soft x-rays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6705, Issue , 2007, Pages

  Voronov, Dmitriy L ^a,b   Cambie, Rossana ^a   Feshchenko, Ruslan M ^c   Gullikson, Eric M ^a   Padmore, Howard A ^a   Vinogradov, Alexander V ^c   Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b NATIONAL TECHNICAL UNIVERSITY   (Ukraine)

^c LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

Anisotropically etched silicon gratings; High density grating; Resonant inelastic soft X ray scattering; Sliced multilayer grating; Soft x ray multilayers; Spectral resolution

Indexed keywords

HIGH DENSITY GRATINGS; RESONANT INELASTIC SOFT X-RAY SCATTERING; SLICED MULTILAYER GRATING; SOFT X-RAY MULTILAYERS;

COMPUTATIONAL METHODS; DIFFRACTION GRATINGS; ELECTRONIC STRUCTURE; MULTILAYERS; OPTICAL FIBER FABRICATION; SPECTROMETERS; X RAYS;

SPECTRAL RESOLUTION;

EID: 42149176190     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.732658     Document Type: Conference Paper

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