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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3150, Issue , 1997, Pages 2-8

Lamellar multilayer gratings with very high diffraction efficiency

(4) Martynov, Vladimir V a,b Padmore, Howard A b Yakshin, A a Agafonov, Yu A a

a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS (Russian Federation)

b LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

Diffraction gratings; Multilayer gratings; Multilayer mirrors; X rays

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVES; LIGHT; MIRRORS; MONOCHROMATORS; SYNCHROTRON RADIATION; SYNCHROTRONS;

DEEP GROOVING; DIFFRACTION ORDERS; GRATING STRUCTURES; HIGH EFFICIENCY; MAXIMUM INTENSITY; MULTILAYER (ML); MULTILAYER GRATINGS; MULTILAYER MIRRORS; X-RAYS;

MULTILAYERS;

EID: 0002653174 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.292728 Document Type: Conference Paper

Times cited : (13)

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