Soft x-ray multilayer coated echelle gratings: Electromagnetic and phenomenological study

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 13, Issue 4, 1996, Pages 811-818

  Neviere M ^a   Montiel, F ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009547677     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.13.000811     Document Type: Article

References (27)

1. M. Nevière and J. Flamand, “Electromagnetic theory as it applies to x-ray and XUV gratings,” Nucl. Instrum. Methods 172, 273–279 (1980).
2. M. Neviere, J. Flamand, and J. M. Lerner, “Optimization of gratings for soft x-ray monochromators,” Nucl. Instrum. Methods 195, 183–189 (1982).
3. M. Neviere, P. Vincent, and R. Petit, “Sur la theorie du reseau conducteur et ses applications a l’optique,” Nouv. Rev. Opt. 5, 65–77 (1974).
4. M. Neviere, “Multilayer coated gratings for x-ray diffraction: differential theory,” J. Opt. Soc. Am. A 8, 1468–1473 (1991).
5. M. Neviere, “Bragg-Fresnel multilayer gratings: electromagnetic theory,” J. Opt. Soc. Am. A 11,1835-1845 (1994).
6. M. Neviere and P. Vincent, “Differential theory of gratings: answer to an objection on its validity for TM polarization,” J. Opt. Soc. Am. A 5, 1522–1524 (1988).
7. F. Montiel and M. Neviere, “Differential theory of gratings: extension to deep gratings of arbitrary profile and permittivity through the R-matrix propagation algorithm,” J. Opt. Soc. Am. A 11,3241-3250 (1994).
8. D. Maystre, “A new general integral theory for dielectric coated gratings,” J. Opt. Soc. Am. 68, 490–495 (1978).
9. D. J. Zvijac and J. C. Light, “R-matrix theory for collinear chemical reactions,” Chem. Phys. 12, 237–251 (1976).
10. J. C. Light and R. B. Walker, “An R-matrix approach to the solution of coupled equations for atom-molecule reactive scattering,” J. Chem. Phys. 65, 4272–4282 (1976).
11. L. F. Sandre and J. M. Elson, “Extinction theorem analysis of diffraction anomalies in overcoated gratings,” J. Opt. Soc. Am. A 8, 763–777 (1991).
12. L. Li, “A multilayer modal method for diffraction gratings of arbitrary profile, depth, and conductivity,” J. Opt. Soc. Am. A 10, 2581–2591 (1993).
13. L. Li, “Multilayer-coated diffraction gratings: differential method of Chandezon et al. revisited,” J. Opt. Soc. Am. A 11, 2816–2828 (1994).
14. H. Bremmer, “The W. K. B. approximation as the first term of a geometric-optical series,” Commun. Pure Appl. Math. 4, 105–115 (1951).
15. D. M. Pai and K. A. Awada, “Analysis of dielectric gratings of arbitrary profiles and thicknesses,” J. Opt. Soc. Am. A 8, 755–762 (1991).
16. M. Neviere and F. Montiel, “Deep gratings: a combination of the differential theory and the multiple reflection series,” Opt. Commun. 108, 1–7 (1994).
17. L. Li, “Bremmer series, R-matrix propagation algorithm, and numerical modeling of diffraction gratings,” J. Opt. Soc. Am. A 11,2829-2836 (1994).
18. F. Abeles, “Recherches sur la propagation des ondes electromagnetiques sinusoidales dans les milieux stratifies. Application aux couches minces,” Ann. Phys. (Paris) 5, 596–640, 706–782 (1950).
19. J. Chandezon, M. T. Dupuis, G. Cornet, and D. Maystre, “Multicoated gratings: a differential formalism applicable in the entire optical region,” J. Opt. Soc. Am. 72, 839–846 (1982).
20. C. Rife, W. R. Hunter, T. W. Barbie Jr., and R. G. Gruddace, “Multilayer-coated blazed grating performance in the soft x-ray region,” Appl. Opt. 28, 2984–2986 (1989).
21. D. L. Windt, “The optical properties of 21 thin film materials in the 10 eV to 500 eV photon energy region,” Ph.D. dissertation (University of Colorado, Boulder, Colo., 1987).
22. B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro, and B. K. Fugikawa, “Low energy x-ray interaction coefficients: photo absorption, scattering and reflection,” in Vol. 27 of Atomic and Nuclear Data Tables (American Institute of Physics, New York, 1982), pp. 1–144.
23. D. Maystre and R. Petit, “Some recent theoretical results for gratings: application for their use in the very far ultraviolet region,” Nouv. Rev. Opt. 7, 165–180 (1976).
24. D. Maystre, M. Neviere, and R. Petit, “Experimental verifications and applications of the theory,” in Electromagnetic Theory of Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), pp. 179–225.
25. M. Neviere, D. Maystre, and W. R. Hunter, “On the use of classical and conical diffraction mountings for XUV gratings,” J. Opt. Soc. Am. 68, 1106–1113 (1978).
26. W. Jark, “Soft x-ray efficiencies: reciprocity theorem, blaze maximum and isoefficiency curves,” Nucl. Instrum. Methods A 266, 414–421 (1988).
27. A. J. F. den Boggende, M. P. Bruijn, J. Verhoeven, H. Zeijle- maker, E. J. Puik, and H. A. Padmore, “A broad-band multilayer coated blazed grating for x-ray wavelengths below 0.6 nm,” in Advanced X-Ray/EUV Radiation Sources and Applications, J. P. Knauer and G. K. Shenoy, Proc. SPIE 1345, 189–197 (1990).