A PDMS-on-silicon deformable grating for spectral differentiation of mixed wavelength signals

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1087-1090

  Truxal, S C ^a   Tung, Y C ^a   Kurabayashi, K ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Detection; Grating; MEMS; PDMS; Photodetector; Spectroscopy; Tunable; Wavelength

Indexed keywords

ACTUATORS; MICROSYSTEMS; NONMETALS; OPTOELECTRONIC DEVICES; SENSORS; SILICON; SPEED; TRANSDUCERS;

CONTINUOUS SPECTRUM; DETECTION; GRATING; GRATING PERIODS; HIGH SPEEDS; HIGHLY SENSITIVE; INTERNATIONAL CONFERENCES; LAB ON A CHIPS; MEMS; MICRO-BRIDGE; MULTIPLE WAVELENGTHS; OPTICAL MEMS; OPTICAL SET-UP; PDMS; PHOTODETECTOR; SINGLE PHOTODETECTOR; SOLID-STATE SENSORS; SPECTRAL ACQUISITION; SPECTRAL DIFFERENTIATION; SPECTROSCOPIC MEASUREMENTS; SPECTROSCOPY; TUN ABILITY; TUNABLE; WAVELENGTH; WAVELENGTH SIGNALS;

WASTEWATER;

EID: 42149138792     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300323     Document Type: Conference Paper

References (8)

1. T. Vilkner, D. Janasek, A. Manz, "Micro Total Analysis Systems. Recent Developments", Anal. Chem, Vol. 76, pp. 3373-3386, 2004.
2. R.F. Wolffenbuttel, "State-of-the-Art in Integrated Optical Microspectrometers", IEEE Trans. Instrum. Meas., Vol. 53, No. 1, pp. 197-202, 2004.
3. G.M. Yee, N.I. Maluf, P.A. Hing, M. Albin, G.T.A. Kovacs, "Miniature spectrometers for biochemical analysis", Sens. Actuat. A, Vol. 58, pp. 61-66, 1997.
4. N. Damean, S.K. Sia, V. Linder, M. Narovlyansky, G.M. Whitesides, "Space- and time-resolved spectrophotometry in microsystems", PNAS, Vol. 102, No. 29, pp, 10035-10039, 2005.
5. M. Tormen, Y-A. Peter, P. Niedermann, A. Hoogerwerf, H. Shea, R. Stanley, "Deformable MEMS grating for wide tunability and high operating speed", Proc. of SPIE, Vol. 6114 61440C, 2006.
6. A.Q. Liu, X.M. Zhang, J. Li, C. Lu, "Single/multi-mode tunable lasers using MEMS mirror and grating", Sens. Actuat. A, Vol. 108, pp. 49-54, 2003.
7. Y.-C. Tung, K. Kurabayashi, "Nanoimprinted Strain-controlled Elastomeric Gratings for Optical Wavelength Tuning" Applied Physics Letters, vol. 86, num. 16, p. 161113, 2005.
8. Y.-C. Tung, S.C. Truxal, K. Kurabayashi, "Multi-scale Soft-lithographic Lift-off and Grafting (MS-SLLOG) Process for Active Polymer Nanophotonic Device Fabrication", Proceedings of SPIE, vol. 6050, p. 605002, 2005.