Excimer laser beam shaping using diffractive optics

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2000, Pages 360-

  Kajava, T ^a   Kaivola, M ^a   Turunen, J ^a   Paakkonen, P ^a   Kuittinen, M ^a   Laakkonen, P ^a   Simonen, J ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; EXCIMER LASERS; LIGHT PROPAGATION; MATHEMATICAL MODELS; OPTIMIZATION;

BEAM SHAPING; GAUSSIAN SCHELL MODEL (GSM); GRATING PERIODS; GROOVE PROFILES; TRANSMISSION PHASE GRATING;

LASER BEAMS;

EID: 0033681840     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)