Homogenization and beam shaping with microlens arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5456, Issue , 2004, Pages 99-107

  Harder, I ^a   Lano, M ^a   Lindlein, N ^a   Schwider, J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Beam shaping; Excimer; Homogenization; LED; Microlens array; Spatial coherence

Indexed keywords

BEAM SHAPING; EXCIMER; HOMOGENIZATION; MICROLENS ARRAYS; SPATIAL COHERENCE;

ARRAYS; COHERENT LIGHT; DIFFRACTION; EXCIMER LASERS; LASER BEAM CUTTING; LIGHT EMITTING DIODES; LIGHTING; MIRRORS; PARAMETER ESTIMATION;

MICROLENSES;

EID: 12344262941     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.549015     Document Type: Conference Paper

References (9)

1. F. Dickey and B. O'Neil, "Multifaceted laser beam integrators: general formulation and design concepts," Opt. Eng. 27, pp. 999-1007, 1988.
2. X. Deng, X. Liang, Z. Chen, W. Yu, and R. Ma, "Uniform illumination of large targets using a lens array," Appl. Opt. 25, pp. 377-381, 1986.
3. N. Lindlein, "Simulation of micro-optical systems including microlens arrays," J. Opt. A: Pure Appl. Opt. 4, pp. S1-S9, 2002.
4. Naumann/Schroeder, Bauelemente der Optik (6. Ed.), Carl Hanser Verlag, Muenchen, Wien, 1992.
5. S. Gloeckner and R. Goering, "Investigation of statistical variations between lenslets of microlens arrays," Appl. Opt. 36, pp. 4436-4445, 1997.
6. J.W.Goodman, Introduction to fourier optics, McGraw-Hill Book Company, 1984.
7. A. Buettner and U. D. Zeitner, "Wave optical analysis of light emitting diode beam shaping using microlens arrays," Opt. Eng. 41, pp. 2393-2401, 2002.
8. L. Erdmann, M. Burkhardt, and R. Brunner, "Coherence management for microlens laser beam homogenizers," in Modeling and Characterization of Light Sources, C. Wooley, ed., pp. 145-154, SPIE Proc. Vol. 4775, 2003.
9. M. Beyerlein, S. Schuberth, and T. Dresel, "Design and numerical analysis of diffractive optical elements for beam-shaping of partially coherent light," in Diffractive Optics, p. 157f, EOS, Topical Meetings digest series: vol. 22, 1999.