Microlens array imaging system for photolithography

Optical Engineering

Volumn 35, Issue 11, 1996, Pages 3323-3330

  Völkel, Reinhard ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Flat panel display fabrication; Micro optics; Microlens arrays; Micromechanics; Multiple aperture; Photolithography

Indexed keywords

EID: 0001287974     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601080     Document Type: Article

References (38)

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