SCOPUS 정보 검색 플랫폼

Volumn 92, Issue 14, 2008, Pages

Characterization of the crystallographic microstructure of the stress-induced void in Cu interconnects

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CRYSTALLOGRAPHY; MICROSTRUCTURE; SEMICONDUCTOR JUNCTIONS;

STRESS-INDUCED VOID (SIV); SUBMICRON SCALE VOID;

COPPER;

EID: 42149108566 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2906902 Document Type: Article

Times cited : (16)

References (11)

1
- 0021312453
- Proceedings of the 22nd Annual IEEE International Reliability Physics Symposium, April 3-5, Las Vegas, NV (unpublished)
- J. Curry, G. Fitzgibbon, Y. Guan, R. Muollo, G. Nelson, and A. Thomas, Proceedings of the 22nd Annual IEEE International Reliability Physics Symposium, 1984, April 3-5, Las Vegas, NV, (unpublished), pp. 6-8.
- (1984) , pp. 6-8
- Curry, J.¹ Fitzgibbon, G.² Guan, Y.³ Muollo, R.⁴ Nelson, G.⁵ Thomas, A.⁶

2
- 0036081971
- Proceedings of the 4th annual IEEE International Reliability Physics Symposium, April 7-11 (unpublished)
- E. T. Ogawa, J. W. McPherson, J. A. Rosal, K. J. Dickerson, T.-C. Chiu, L. Y. Tsung, M. K. Jain, T. D. Bonifield, J. C. Ondrusek, and W. R. McKee, Proceedings of the 4th annual IEEE International Reliability Physics Symposium 2002, April 7-11 (unpublished), pp. 312-321.
- (2002) , pp. 312-321
- Ogawa, E.T.¹ McPherson, J.W.² Rosal, J.A.³ Dickerson, K.J.⁴ Chiu, T.-C.⁵ Tsung, L.Y.⁶ Jain, M.K.⁷ Bonifield, T.D.⁸ Ondrusek, J.C.⁹ McKee, W.R.¹⁰

3
- 28244438405
- IEEE International Interconnect Technology Conference Proceedings, June 6-8 (unpublished)
- S.-J. Lee, S.-G. Lee, B.-S. Suh, H. Shin, N.-I. Lee, H.-K. Kang, and G. Suh, IEEE International Interconnect Technology Conference Proceedings, 2005, June 6-8 (unpublished), pp. 108-110.
- (2005) , pp. 108-110
- Lee, S.-J.¹ Lee, S.-G.² Suh, B.-S.³ Shin, H.⁴ Lee, N.-I.⁵ Kang, H.-K.⁶ Suh, G.⁷

4
- 36449004211
- J. A. Nucci, Y. Shacham-Diamand, and J. E. Sanchez, Jr., Appl. Phys. Lett. 66, 3585 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3585
- Nucci, J.A.¹ Shacham-Diamand, Y.² Sanchez Jr., J.E.³

5
- 0000906563
- J. A. Nucci, R. R. Keller, J. E. Sanchez, Jr., and Y. Shacham-Diamand, Appl. Phys. Lett. 69, 4017 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 4017
- Nucci, J.A.¹ Keller, R.R.² Sanchez Jr., J.E.³ Shacham-Diamand, Y.⁴

6
- 0038974363
- A. Sekiguchi, J. Koike, S. Kamiya, M. Saka, and K. Maruyama, Appl. Phys. Lett. 79, 1264 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 1264
- Sekiguchi, A.¹ Koike, J.² Kamiya, S.³ Saka, M.⁴ Maruyama, K.⁵

7
- 79956057554
- J. Koike, M. Wada, M. Sanada, and K. Maruyama, Appl. Phys. Lett. 81, 1017 (2002).
- (2002) Appl. Phys. Lett. , vol.81 , pp. 1017
- Koike, J.¹ Wada, M.² Sanada, M.³ Maruyama, K.⁴

8
- 0038180691
- D. N. Lee, Thin Solid Films 434, 183 (2003).
- (2003) Thin Solid Films , vol.434 , pp. 183
- Lee, D.N.¹

9
- 42149126991
- Introduction to Texture Analysis Macrotexture, Microtexture and Orientation Mapping (Gordon and Breach, The Netherlands)
- V. Randle and O. Engler, Introduction to Texture Analysis Macrotexture, Microtexture and Orientation Mapping (Gordon and Breach, The Netherlands, 2000), pp. 224-236.
- (2000) , pp. 224-236
- Randle, V.¹ Engler, O.²

10
- 0037424172
- R. Spolenak, W. L. Brown, N. Tamura, A. A. MacDowell, R. S. Celestre, H. A. Padmore, B. Valek, J. C. Bravman, T. Marieb, H. Fujimoto, B. W. Batterman, and J. R. Patel, Phys. Rev. Lett. 90, 096102 (2003).
- (2003) Phys. Rev. Lett. , vol.90 , pp. 096102
- Spolenak, R.¹ Brown, W.L.² Tamura, N.³ MacDowell, A.A.⁴ Celestre, R.S.⁵ Padmore, H.A.⁶ Valek, B.⁷ Bravman, J.C.⁸ Marieb, T.⁹ Fujimoto, H.¹⁰ Batterman, B.W.¹¹ Patel, J.R.¹²

11
- 34548851695
- A. H. King, Mater. Sci. Technol. 23, 505 (2007).
- (2007) Mater. Sci. Technol. , vol.23 , pp. 505
- King, A.H.¹

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