MEMS tunable silicon fabry-perot cavity

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6717, Issue , 2007, Pages

  Masson, Jonathan ^a   Koné, Fatou Binetou ^a   Peter, Yves Alain ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Bragg; DRIE; Fabry Perot; Grating; MEMs

Indexed keywords

COMPUTER SIMULATION; FABRY-PEROT INTERFEROMETERS; MICROMACHINING; MIRRORS; SILICON;

DIELECTRIC MIRROR; SILICON FABRY-PEROT CAVITY;

MEMS;

EID: 42149087166     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.754325     Document Type: Conference Paper

References (6)

1. S.-S. Yun, K.-W. Jo, J.-H. Lee, "Crystalline Si-based in-plane tunable Fabry-Perot filter with wide tunable range," in IEEE/LEOS International Conference on Optical MEMS and Their Applications, pp 77-78, 2003.
2. A. Lipson, E. M. Yeatman, "Free-space MEMS tunable optical filter on (110) silicon", in International Conference on Optical MEMS and Their Applications, Oulu, Finalnd, 2005, pp. 73-74, IEEE/LEOS.
3. B. Saadany, M. Malak, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, "Electrostatically-tuned Optical Filter Based on Silicon Bragg Reflectors", in IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 2006, pp. 86-87.
4. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, "Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors", Optics Letters, Vol. 32, No. 5, 2007.
5. J. Masson, S. Bergeron, A. Poulin, N. Godbout and Y.-A. Peter, "Tunable erbium doped fiber laser using a silicon micro-electro-mechanical (MEM) Fabry-Perot cavity", accepted in IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, August 2007.
6. Y.-A. Peter, F. B. Koné, J. Masson and N. Godbout, "Tunable micro-electromechanical grating in silicon," (invited paper) in SPIE Optomechatronic Micro/Nano Devices and Components II, Optics East 2006, Boston, Massachusetts, vol. 6376, paper 04, SPIE.