Tunable micro-electromechanical grating in silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6376, Issue , 2006, Pages

  Peter, Yves Alain ^a   Koné, Fatou Binetou ^a   Masson, Jonathan ^a   Godbout, Nicolas ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Bragg; DRIE; Fabry Perot; Grating; MEMs; Silicon

Indexed keywords

ELECTROSTATIC ACTUATORS; FABRY-PEROT INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; SILICON;

BRAGG GRATINGS; MICROELECTROMECHANICAL GRATINGS; NANO MACHINING;

DIFFRACTION GRATINGS;

EID: 33846223919     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.690773     Document Type: Conference Paper

References (13)

1. J.-P. Laude and J.M. Lerner, "Wavelength division multiplexing/demultiplexing (WDM) using diffraction gratings," Proceedings of the SPIE, Vol. 503, pp. 22-28, 1984.
2. E.G. Loewen, "Diffraction gratings for spectroscopy," Journal of Physics E (Scientific Instruments), Vol. 3, No. 12, pp. 953-61, 1970.
3. A. Othonos, "Fiber Bragg gratings," Rev. Sci. Instrum., Vol. 68, No. 12, pp. 4309-4341, 1997.
4. R. Kashyap, "Fiber Bragg gratings," Academic Press, 1999.
5. K.O. Hill and G. Meltz, "Fiber Bragg grating technology fundamentals and overview," Journal of Lightwave Technology, Vol 15, No. 8, pp. 1263-1276, 1997.
6. J. Pan,Y. Shi, T. Zhu,"Continuously tunable high power fiber lasers with 11 nm tunability," Optical Fiber Communication Conference, Vol. 2, pp. 199-201, 1999.
7. D. Anthon, J.D. Berger, J. Drake, S. Dutta, A. Fennema, J.D.Grade, S. Hrinya, F. Ilkov, H. Jerman, D. King, H. Lee, A. Tselikov, K. Yasumura, "External cavity diode lasers tuned with silicon MEMS," Optical Fiber Communication Conference, Anaheim, CA, March 17-22, pp. 97-98, 2002.
8. O. Solgaard, E S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Optics Letters, Vol. 17, No. 9, pp. 688-690, 1992.
9. D.M. Bloom, "The Grating Light Valve: revolutionizing display technology," Proceedings of the SPIE, Vol. 3013, pp. 165-171, 1997.
10. M. Tormen, Y.-A. Peter, Ph. Niedermann, A. Hoogerwerf, R. Stanley, "Deformable MEMS grating for wide tunability and high operating speed," Journal of Optics A: Pure and Applied Optics, Vol. 8, No. 7, pp. S337-40, 2006.
11. A. Lipson et al., "Low-loss one-dimensional photonic bandgap filter in (110) silicon," Optics Letters, Vol. 31, No. 3, 2006.
12. H. Kogelnik and T. Li, "Laser beams and resonators," Applied Optics, Vol. 5, No. 10, pp. 1550-1567, 1966.
13. S. Weidong, L. Xiangdong, H. Biqin, Z. Yong, L. Xu, G. Peifu, "Analysis on the tunable optical properties of MOEMS filter based on Fabry-Perot Cavity," Optics Communications, Vol. 239, pp. 153-160, 2004.