Electrostatically-tuned optical filter based on silicon Bragg reflectors

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 86-87

  Saadany, B ^a   Malak, M ^b   Marty, F ^a   Mita, Y ^c   Khalil, D ^b   Bourouina, T ^a  

^a National Centre of Scientific Research   (France)

^b AIN SHAMS UNIVERSITY   (Egypt)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Bragg mirrors; DRIE; Fabry P rot resonator; SOI; Tunable optical filter

Indexed keywords

ELECTROSTATIC ACTUATORS; OPTICAL FILTERS; OPTICAL RESOLVING POWER; SILICON WAFERS;

BRAGG MIRRORS; TUNABLE OPTICAL FILTER;

BRAGG REFLECTORS;

EID: 41549084772     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708277     Document Type: Conference Paper

References (7)

1. J.H. Lee, S. Yun « Micromachined in-plane tunable optical filter using thermo-optic effect ». Proceedings of SPIE Vol. #4983 (2003) 195-202
2. B. Saadany, T. Bourouina, D. Khalil, "Design of a MEMS Tunable Optical Filter Based on a Novel Vertical DBR Architecture", MEMSWAVE Conference, Toulouse, France, July 2-4 (2003) Poster.
3. S.S. Yun, K.W. Jo and J.H. Lee « Crystalline Si-based In-plane Tunable Fabry-Perot Filter with Wide Tunable Range » IEEE/LEOS Optical MEMS and their applications, Hawaii, August 19 (2003)
4. S.S. Yun and J.H. Lee "A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon". J. Micromech. Microeng. 13 (2003) 721-725
5. B. Saadany, F. Marty, Y. Mita, D. Khalil and T. Bourouina, 'A MEMS Tunable Optical Filter Based on Vertical DBR Architecture'. DTIP'04; Design, Test, Integration and Packaging of MEMS and MOEMS, Montreux, Switzerland, May 12-14 (2004).
6. F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina "Advanced Silicon Etching Techniques Based on Deep Reactive Ion Etching (DRIE) for Silicon HARNS and 3D Micro- and Nano-Structures", ASME/European Micro and Nanosystem Conference EMN'04, Paris, October 20-21 (2004) 25-28
7. F. Marty, B. Saadany, T. Bourouina, Y. Mita, T. Shibata "High Aspect Ratio Nano-Structures (HARNS) For Photonic Mems Based On Vertical Dbr Architecture". The 13th international conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS'05, Seoul, Korea, June 5-9, Volume 2 (2005) 1449-1452