Transmission-type laser THz emission microscope using a solid immersion lens

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 14, Issue 2, 2008, Pages 498-504

  Kim, Sunmi ^a   Murakami, Hironaru ^a   Tonouchi, Masayoshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Femtosecond (fs) laser; Microscopy; Solid immersion lens (SIL); Terahertz (THz)

Indexed keywords

IMAGING SYSTEMS; INTEGRATED CIRCUITS; MICROSCOPES; REFRACTIVE INDEX; TRANSMISSION ELECTRON MICROSCOPY; ULTRASHORT PULSES;

OPTICAL COMPONENTS; SOLID IMMERSION LENS (SIL); TERAHERTZ (THZ); TRANSMISSION SYSTEMS;

LENSES;

EID: 41949136228     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.913425     Document Type: Article

References (21)

1. B. B. Hu and M. C. Nuss, "Imaging with terahertz waves," Opt. Lett., vol. 20, no. 16, pp. 1716-1718, Aug. 1995.
2. D. M. Mittleman, R. H. Jacobsen, and M. C. Nuss, "T-ray imaging," IEEE J. Sel. Topics Quantum Electron., vol. 2, no. 3, pp. 679-692, Sep. 1996.
3. D. M. Mittleman, M. Gupta, R. Neelamani, R. G. Baraniuk, J. V. Rudd, and M. Koch, "Recent advantages in terahertz imaging," Appl. Phys. B, Photophys. Laser Chem., vol. 69, pp. 1085-1094, Jun. 1999.
4. B. Ferguson and X.-D. Zang, "Materials for terahertz science and technology," Nat. Mater., vol. 1, pp. 26-32, Sep. 2002.
5. M. Tonouchi, "Cutting-edge terahertz technology," Nat. Photon., vol. 1, pp. 97-105, Feb. 2007.
6. S. Hunsche, M. Koch, I. Brener, and M. C. Nuss, "THz near-field imaging," Opt. Commun, vol. 150, pp. 22-26, May 1998.
7. K. Ishihara, T. Ikari, H. Minamide, J. Shikata, K. Ohashi, H. Yokoyama, and H. Ito, "Terahertz near-field imaging using enhanced transmission through a single subwavelength aperture," Jpn. J. Appl. Phys., vol. 44, pp. L929-L931, Jul. 2005.
8. N. C. J. Van Der Valk and P. C. M. Planken, "Electro-optic detection of subwavelength terahertz spot sizes in. the near field of a metal tip," Appl. Phys. Lett., vol. 81, pp. 1558-1560, Aug. 2002.
9. R. Lecaque, S. Grésillon, N. Barbey, R. Peretti, J.-C. Rivoal, and C. Boceara, "THz near-field optical, imaging by a local source," Opt. Commun., vol. 262, pp. 125-128, Jun. 2006.
10. I. Brener, D. Dykaar, A. Frommer, L. N. Pfeiffer, J. Lopata, J. Wynn, K. West, and M. C. Nuss, "Terahertz emission from electric field singularities in biased semiconductors," Opt. Lett., vol. 21, pp. 1924-1926, Dec. 1996.
11. Y. Cal, I. Brener, J. Lopata, J. Wynn, and L. Pfeiffer, "Design and performance of singular electric field terahertz photoconducting antennas," Appl. Phys. Lett., vol. 71, pp. 2076-2078, Oct. 1997.
12. 7 thin films using THz radiation excited with femtosecond laser pulses," Appl. Phys. Lett., vol. 74, pp. 1317-1319, Mar. 1999.
13. 7 -d thin films strips," J. Appl. Phys., vol. 87, pp. 7366-7375, May 2000.
14. T. Kiwa, M. Tonouchi, M. Yamashita, and K. Kawase, "Laser terahertz emission microscope for inspecting electrical failures in integrated circuits," Opt. Lett., vol. 28, pp. 2058-2060, Nov. 2003.
15. M. Yamashita, K. Kawase, C. Otani, T. Kiwa, and M. Tonouchi, "Imaging of large-scale integrated circuits using laser terahertz emission microscopy," Opt. Express, vol. 13, pp. 115-120, Jan. 2005.
16. H. Murakami, N. Uchida, R. Inoue, S. Kim, T. Kiwa, and M. Tonouchi, "Laser terahertz emission microscope," Proc. IEEE, vol. 95, no. 8, pp. 1646-1657, Aug. 2007.
17. R. Inoue, N. Uchida, and M. Tonouchi, "Scanning probe laser terahertz emission microscopy system," Jpn. J. Appl. Phys., vol. 45, no. 31, pp. L824-L826, Oct. 2006.
18. D. A. Fletcher, K. B. Crozier, K. W. Guarini, S. C. Minne, G. S. Kino, C. F. Quate, and K. E. Goodson, "Microfabricated silicon solid immersion lens," J. Microelectromech. Syst., vol. 10, pp. 450-459, Sep. 2001.
19. K. Sakai, Ed., Terahertz Optoelectronics. New York: Springer-Verlag, 2005, ch. 1.
20. X.-C. Zang and D. H. Auston, "Optoelectronic measurement of semiconductor surfaces and interfaces with, femtosecond optics," J. Appl. Phys., vol. 71, pp. 326-338, Jan. 1992.
21. S. Moehl, H. Zhao, B. D. Don, S. Wachter, and H. Kalt, "Solid immersion lens-enhanced nano-photoluminescence: Principle and applications," J. Appl. Phys., vol. 93, pp. 6265-6272, May 2003.