Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

Optics Letters

Volumn 28, Issue 21, 2003, Pages 2058-2060

  Kiwa, Toshihiko ^a   Tonouchi, Masayoshi ^a   Yamashita, Masatsugu ^b   Kawase, Kodo ^b  

^a OSAKA UNIVERSITY   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); INTEGRATED CIRCUITS; LASER APPLICATIONS; LIGHT EMISSION; MICROSCOPIC EXAMINATION;

LASER TERAHERTZ EMISSION MICROSCOPES (LTEM);

ELECTRIC FAULT CURRENTS;

EID: 0242269961     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.28.002058     Document Type: Article

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