Imaging of large-scale integrated circuits using laser terahertz emission microscopy

Optics Express

Volumn 13, Issue 1, 2005, Pages 115-120

  Yamashita, Masatsugu ^a   Kawase, Kodo ^a   Otani, Chiko ^a   Kiwa, Toshihiko ^b   Tonouchi, Masayoshi ^c  

^a RIKEN   (Japan)

^b OKAYAMA UNIVERSITY   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; DOPING (ADDITIVES); ELECTRON BEAMS; FIBER LASERS; IMAGING TECHNIQUES; INDIUM COMPOUNDS; LASER BEAM EFFECTS; LASER PULSES; LIGHT TRANSMISSION; MICROPROCESSOR CHIPS; OPERATIONAL AMPLIFIERS; PHOTOCONDUCTING DEVICES; PHOTOCURRENTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

FEMTOSECOND LASERS; LASER TERAHERTZ EMISSION MICROSCOPY (LTEM); SCANNING MICROSCOPY; ULTRAFAST TECHNOLOGY;

LSI CIRCUITS;

EID: 13544254534     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.000115     Document Type: Article

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