A novel pressure sensing mechanism in a microchannel based on the surface tension and thermodynamic p-v-T relation

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Lee, Sang Youp ^a,b   Wereley, Steve T ^a  

^a PURDUE UNIVERSITY   (United States)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; MICROFABRICATION; PHOTORESISTS; PRESSURE MEASUREMENT; PRESSURE SENSORS; SURFACE TENSION; THERMODYNAMIC PROPERTIES;

CLOSED-END TAPS; MENISCUS LOCATION; MICROSCALE FLOW; PRESSURE SENSING;

MICROCHANNELS;

EID: 41849131789     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015020     Document Type: Article

References (17)

1. Liu J, Tai Y C, Pong K C and Ho C M 1993 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers'93 pp 995-8
2. Pong K C, Ho C M, Liu J and Tai Y C 1994 Appl. to Microfabrication to Fluid Mechanics, ASME-FED 197 51-6
3. Jang J, Zhao Y, Wereley S T and Gui L 2002 Proc. ASME Int. Mechanical Engineering Congress and Exposition paper 2002-33779
4. Batchelor G 1967 An Introduction to Fluid Dynamics (Cambridge: Cambridge University Press)
5. Jackman R J, Floyd T M, Ghodssi R, Schmidt M A and Jensen K F 2001 J. Micromech. Microeng. 11 263-9
6. Tabata O, Asahi Rand Funabashi H, Shimaoka K and Sugiyama S 1992 Sensors Actuators A 34 51-7
7. Concus P and Finn R 1974 Acta Math. 132 177-98
8. Wong H, Morris S and Radke C J 1991 J. Colloid Interface Sci. 148 317-36
9. Latva-Kokko M and Rothman D H 2005 Phys. Rev. E 72 046701
10. Maboudian R 1998 Surf. Sci. Rep. 30 207-69
11. Liebermann L 1957 J. Appl. Phys. 28 205-11
12. Manley D M J P 1960 Br. J. Appl. Phys. 11 38-42
13. Abdelkader A F and White J R 2005 J. Appl. Polym. Sci. 98 2544-9
14. Childs E C and Collis-George N 1950 Proc. R. Soc. London A 201 392-405
15. Gerlach A, Keller W, Schulz J and Schumacher K 2001 Microsyst. Technol. 7 17-22
16. Van Amerongen G J 1946 J. Appl. Phys. 17 972-85
17. Plastics Design Library Staff 1995 Permeability and Other Film Properties of Plastics and Elastomers (New York: William Andrew Publishing/Plastics Design Library)