Custom fabricated high-Q analog dual-gap RF MEMS varactors

16th International Conference on Microwaves, Radar and Wireless Communications, MIKON 2006

Volumn , Issue , 2006, Pages 155-158

  McFeetors, G ^a   Okoniewski, M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MEMS; NATURAL FREQUENCIES; PRODUCT DESIGN;

CAPACITOR DESIGN; ELECTROSTATIC TUNING;

VARACTORS;

EID: 41849098175     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIKON.2006.4345127     Document Type: Conference Paper

References (8)

1. L. Dussopt and O. Rebeiz, "High-Q Millimeter-Wave MEMS Varactors: Extended Tuning Range and Discrete-Position Designs", IEEE MTT-SInt. Microwave Symp. Digest 2002, pp. 1205-1208.
2. J. Chen, et. al., "Design and Modeling of a Micromachined High-Q Tunable Capacitor with Large Tuning Range and a Vertical Planar Spiral Inductor", IEEE Trans. on Electron Devices, vol. 30, no. 3, pp. 730-739, March 2003.
3. D. Peroulis, S. Mohammadi, and L. P. B. Katehi, "Electrostatically- Tunable Analog RF MEMS Varactors with measured capacitance range of 300%," IEEE MTT-S Int. Microwave Symp. Digest, vol. 3, pp. 1793-1796, June 2003.
4. R. L. Borwick, et. al., "A high W+, large tuning range MEMS capacitor for RF filter systems", Sensors and Actuators A: Physical, vol. 103, no. 1, pp. 33-41, January 2003.
5. G. M. Rebeiz, RF MEMS Theory, Design, and Technology. Hoboken, NJ, John Wiley \& Sons, 2003.
6. G. McFeetors and M. Okoniewski, "Distributed MEMS Analog Phase Shifter With Enhanced Tuning", IEEE Microwave and Wireless Components Letters, vol. 16, no. 1, pp. 34-36, January, 2006.
7. E. S. Hung and S. D. Senturia, "Extending the Travel Range of Analog-Tuned Electrostatic Actuators", Journal of Michromechanical Systems, vol. 8, no. 8, pp. 497-505, December 1999.
8. J. Zou, C. Liu, J. Schutt-Aine, J.Chen, S. Kang, "Development of a wide tuning range MEMS tunable capacitor for wireless communication systems", Electron Devices Meeting, 2000 IEDM Technical Digest International, pp. 403-406, December 2000