Surface erosion and modification by energetic ions

Vacuum

Volumn 82, Issue 9, 2008, Pages 872-879

  Insepov, Z ^a   Norem, J ^a   Swenson, D R ^b   Hassanein, A ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Epion Corporation   (United States)

^c PURDUE UNIVERSITY   (United States)

Author keywords

Coulomb explosion; Gas cluster ion beam; Highly charged ion; Molecular dynamics; Shock wave; Sputtering; Tungsten

Indexed keywords

COULOMB INTERACTIONS; ION BEAMS; MAGNETRON SPUTTERING; SHOCK WAVES; TUNGSTEN;

COULOMB EXPLOSION; GAS CLUSTER ION BEAM;

MOLECULAR DYNAMICS;

EID: 41749092991     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.12.012     Document Type: Article

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