Radiation-induced synergistic effects of athermal and thermal mechanisms on erosion and surface evolution of advanced electrode and condenser optics materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 1, 2004, Pages 112-121

  Allain, Jean P ^a   Hassanein, Ahmed ^a   Burtseva, Tatiana ^a   Yacout, Abdelatif ^a   Insepov, Zinetulla ^a   Taj, Sarfraz ^c   Rice, Bryan J ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b INTEL CORPORATION   (United States)

^c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Amorphization; Collisional mixing; Condenser optics; Diffusion; Preferential sputtering; Segregation

Indexed keywords

AMORPHIZATION; COATINGS; ELECTRODES; PLASMAS; SEGREGATION (METALLOGRAPHY); THERMAL DIFFUSION; ULTRAVIOLET RADIATION;

COLLISIONAL MIXING; CONDENSER OPTICS; PREFERENTIAL SPUTTERING; SEGREGATION;

LITHOGRAPHY;

EID: 3843105713     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.534439     Document Type: Conference Paper

References (4)

1. S. Bajt, H.N. Chapman, N. Nguyen, J. Alameda, et al. "Design and Performance of capping layers for extreme-ultraviolet multilayer mirrors", Applied Optics, Vol. 42, No. 28, 2003.
2. J.P. Allain, M.D. Coventry, D.N. Ruzic, "Temperature dependence of lithium sputtering under low-energy singly-charged particle bombardment", to be submitted in Journal of Applied Physics, 2004.
3. Terasawa, M., Z.A. Insepov, T. Sekioka, A.A. Valuev, and T. Mitamura. "Sputtering Due to Coulomb Explosion in Highly Charge Ion Bombardment." Nuclear Instruments & Methods in Physics Research B 212 (2003) 436-41.
4. J.P. Allain, "QCM-DCU diagnostic system for the measurement of physical sputtering of liquid-metals", to be submitted in Review of Scientific Instruments, 2004.