Real time spectroscopic ellipsometry of sputtered CdTe: Effect of growth temperature on structural and optical properties

Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4

Volumn 1, Issue , 2006, Pages 392-395

  Li, Jian ^a   Chen, Jie ^a   Podraza, N J ^a   Collins, R W ^a  

^a UNIVERSITY OF TOLEDO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CADMIUM ALLOYS; ELLIPSOMETRY; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; THIN FILMS;

PROCESS-PROPERTY RELATIONS; REAL TIME SPECTROSCOPIC ELLIPSOMETRY (RTSE);

POLYCRYSTALLINE MATERIALS;

EID: 41749087589     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCPEC.2006.279472     Document Type: Conference Paper

References (7)

1. R.W. Collins, A.S. Ferlauto, G.M. Ferreira, C. Chen, J. Koh, R.J. Koval, Y. Lee, J.M. Pearce, C.R. Wronski, Solar Energy Mater. Solar Cells 78, 143 (2003).
2. J. Li, J. Chen, J. Zapien, N. Podraza, C. Chen, J. Drayton, A. Vasko, A. Gupta, S. Wang, R.W. Collins, A.D. Compaan, MRS Symp. Proc. 865, F12.1 (2005).
3. A. Gupta and A.D. Compaan, Appl. Phys. Lett. 85, 684 (2004).
4. B. Johs, C. Herzinger, J. Dinan, A. Cornfeld, J. Benson, Thin Solid Films 313, 137 (1998).
5. D. Dunstan, B. Gil, C Priester, K. Homewood, Semicond. Sci. Technol. 4, 241 (1989).
6. H. Windischmann, J. Vac. Sci. Technol. A 9, 2431 (1991).
7. R.W. Collins and A.S. Ferlauto, in Handbook of Ellipsometry, (William Andrew, Norwich, NY, 2005), p. 93.