Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 2, 2008, Pages 689-693

  Cho, Jung Bin ^a   Lee, Soonil ^a   Yoon, Hyeun Jung ^a   Yang, Sang Sik ^a   Koh, Ken Ha ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

IONS; MASS SPECTROMETERS; NANOPARTICLES; TRIODES;

MINIATURE MASS SPECTROMETERS; TRIODE ELECTRON EMITTERS;

ELECTRONS;

EID: 41549133520     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2835065     Document Type: Article

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