Fabrication of low-gate-current triode field emitters with planar carbon nanoparticle cathodes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 1294-1297

  Seo, Woo Jong ^a   Choi, Seungho ^a   Lee, Soonil ^a   Koh, Ken Ha ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRON EMISSION; ETCHING; LAPLACE TRANSFORMS; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TRIODES;

ETCHANTS; FIELD EMITTERS; GATE CURRENTS; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD);

CARBON;

EID: 3242658238     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1736635     Document Type: Conference Paper

References (12)

1. K. H. Park, W. J. Seo, S. Lee, and K. H. Koh, Appl. Phys. Lett. 81, 358 (2002).
2. K. H. Park, W. J. Seo, S. Lee, and K. H. Koh, J. Vac. Sci. Technol. B 21, 1675 (2003).
3. K. H. Park, S. Lee, and K. H. Koh, J. Vac. Sci. Technol. B 21, 1680 (2003).
4. R. G. Forbes, Solid-State Electron. 45, 779 (2001), and references therein.
5. K. H. Park, S. Choi, K. M. Lee, S.-G. Oh, S. Lee, and K. H. Koh, J. Korean Phys. Soc. 37, L153 (2000).
6. K. H. Park, K. M. Lee, S. Choi, S. Lee, and K. H. Koh, J. Vac. Sci. Technol. B 19, 946 (2001).
7. K. H. Park, S. Choi, K. M. Lee, S. Lee, and K. H. Koh, J. Vac. Sci. Technol. B 19, 958 (2001).
8. K. H. Park, H. J. Han, S. Choi, K. M. Lee, S. Lee, and K. H. Koh, J. Vac. Sci. Technol. B 21, 562 (2003).
9. K. M. Lee, H. J. Han, S. Choi, K. H. Park, S.-G. Oh, S. Lee, and K. H. Koh, J. Vac. Sci. Technol. B 21, 623 (2003).
10. C. A. Spindt, I. Brodie, L. Humphrey, and E. R. Westerberg, J. Appl. Phys. 47, 5248 (1976).
11. P. Kohnke, ANSYS User's Manual for Revision 5.0, Volume IV: Theory (Swanson Analysis Systems Inc., Houston, 1992).
12. H. Y. Ahn, Ph.D. thesis, Seoul National University, Korea, 1996.