Investigation of the occupation behavior for oxygen atoms in AlN films using Raman spectroscopy

Journal of Applied Physics

Volumn 103, Issue 6, 2008, Pages

  McCullen, E F ^a   Thakur, J S ^a   Danylyuk, Y V ^a   Auner, G W ^a   Rosenberger, L W ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CONTAMINATION; MOLECULAR BEAM EPITAXY; MOLECULAR VIBRATIONS; OXYGEN; PLASMA SOURCES; X RAY PHOTOELECTRON SPECTROSCOPY;

RAMAN MODES; SPECTRAL FEATURES;

THIN FILMS;

EID: 41549105474     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2894588     Document Type: Article

References (23)

1. J. H. Edgar, Properties of Group III Nitrides (INSPEC, London, 1994), p. 11.
2. J. W. Orton and C. T. Foxon, Rep. Prog. Phys. RPPHAG 0034-4885 10.1088/0034-4885/61/1/001 61, 1 (1998).
3. G. W. Auner, T. Lenane, F. Ahmad, R. Naik, and P. K. Kuo, Wide Bandgap Electronic Materials, edited by, Z. L. Wu, and, M. A. Prelas, (Kluwer Academic, Dordrecht, 1995), p. 329.
4. M. R. Safadi, G. W. Auner, R. Iezzi, P. McAllister, and G. Abrams, Proc. SPIE PSISDG 0277-786X 4982, 330 (2003).
5. H. X. Jiang and J. Y. Lin, Crit. Rev. Solid State Mater. Sci. CCRSDA 1040-8436 10.1080/10408430390802440 28, 131 (2003).
6. E. F. McCullen, H. E. Prakasam, W. Mo, R. Naik, K. Y. S. Ng, L. Rimai, and G. W. Auner, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1563312 93, 5757 (2003).
7. L. Zhang, E. F. McCullen, H. E. Prakasam, J. Thakur, R. Naik, G. W. Auner, and K. Y. S. Ng, Sens. Actuators B SABCEB 0925-4005 123, 277 (2007).
8. J. S. Thakur, H. E. Prakasam, L. Zhang, E. F. McCullen, L. Rimai, V. M. Garcia Suarez, R. Naik, K. Y. S. Ng, and G. W. Auner, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.75.075308 75, 075308 (2007).
9. M. H. Rahman, J. S. Thakur, L. Rimai, G. W. Auner, R. Naik, Z. A. Chaudhury, and G. Newaz, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2719006 101, 094501 (2007).
10. L. F. Zhang, E. F. McCullen, M. H. Rahman, J. S. Thakur, L. Rimai, R. J. Baird, R. Naik, G. Newaz, G. W. Auner, and K. Y. S. Ng, Sens. Actuators B SABCEB 0925-4005 113, 843 (2006).
11. M. H. Rahman, J. S. Thakur, L. Rimai, S. Perooly, R. Naik, L. Zhang, G. W. Auner, and G. Newaz, " Dual-mode operation of a Pd/AlN/SiC device for hydrogen sensing. " Sens. Actuators B SABCEB 0925-4005 129, 35 (2008).
12. C. Stampfl and C. G. Van de Walle, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.65.155212 65, 155212 (2002).
13. J. H. Harris, R. A. Youngman, and R. G. Teller, J. Mater. Res. JMREEE 0884-2914 5, 1763 (1990).
14. M. Kazan, B. Ruffle, C. Zgheib, and P. Masri, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2137461 98, 103529 (2005).
15. M. Kazan, B. Ruffle, C. Zgheib, and P. Masri, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/j.diamond.2005.12.034 15, 1525 (2006).
16. L. Vergara, M. Clement, E. Iborra, A. Sanz-Hervas, J. Garcia Lopez, Y. Morilla, J. Sangrador, and M. A. Respaldiza, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/j.diamond.2003.10.063 13, 839 (2004).
17. L. McNeil, M. Grimsditch, and R. French, J. Am. Ceram. Soc. JACTAW 0002-7820 10.1111/j.1151-2916.1993.tb03730.x 76, 1132 (1993).
18. L. Rosenberger, R. J. Baird, E. F. McCullen, G. W. Auner, and G. Shreve, Surf. Interface Anal. SIANDQ 0142-2421 (to be published).
19. A. D. Westwood, R. A. Youngman, M. R. McCartney, A. N. Cormack, and M. R. Notis, J. Mater. Res. JMREEE 0884-2914 10, 2573 (1995).
20. M. Kazan, Ch. Zgheib, E. Moussaed, and P. Masri, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/j.diamond.2005.11.014 15, 1169 (2006).
21. T. Prokofyeva, M. Seon, J. Vanbuskirk, M. Holtz, S. A. Nikishin, N. N. Faleev, H. Temkin, and S. Zollner, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.63.125313 63, 125313 (2001).
22. K. Kornitzer, W. Limmer, K. Thonke, R. Sauer, D. G. Ebling, L. Steinke, and K. W. Benz, J. Cryst. Growth JCRGAE 0022-0248 201202, 441 (1999).
23. L. Bergman, D. Alexson, P. L. Murphy, R. J. Neumanich, M. Dutta, M. A. Stroscio, C. Balkas, H. Shin, and R. F. Davis, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.59.12977 59, 12977 (1999).