Curved micromachined ultrasonic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 572-576

  Wong, K A ^a   Panda, S ^a   Ladabaum, I ^a  

^a Sensant Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BANDWIDTH; ELECTRONIC EQUIPMENT; FREQUENCIES; IMAGING TECHNIQUES; MICROMACHINING; MICROPROCESSOR CHIPS; PIEZOELECTRIC DEVICES; PROBES; SOFTWARE PROTOTYPING;

CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS (CMUT); MECHANICAL IMPEDANCE; ON-CHIP ELECTRONICS; ULTRASOUND PROBES;

ULTRASONIC TRANSDUCERS;

EID: 4143146537     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. M. Haller and B. T. Khuri-Yakub, "A surface micromachined electrostatic ultrasonic air transducer," in Ultrasonics Symp., Cannes, France, 1994, pp. 1241-1244.
2. H.T. Soh, I. Ladabaum, A. Atalar, C.F. Quate, and B. T. Khuri-Yakub, "Silicon micromachined ultrasonic immersion transducers" Appl. Phys. Lett., vol. 69, no. 24, pp. 3674-3676, 1996.
3. D.W. Schindel, D.A. Hutchins, L. Zou, and M. Sayer, "The design and characterization of micromachined air-coupled capacitance transducers," IEEE Trans. Ultrason., Ferroelectr., Freq. Contr., vol. 42, pp. 42-50, Jan. 1995.
4. P. Eccardt, K. Niederer, and B. Fischer, "Micromachined transducers for ultrasound applications," in Ultrasonics Symp., Toronto, Canada, Oct. 1997.
5. I. Ladabaum, X. C. Jin, H. T. Soh, A. Atalar, and B.T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Trans. Ultrason., Ferroelectr., Freq. Contr., vol. 45, pp. 678-690, May 1998.
6. X.C. Jin, I. Ladabaum, F. L. Degertekin, S. Calmes, and B.T. Khuri-Yakub, "Fabrication and Characterization of Surface Micromachined Capacitive Ultrasonic Immersion Transducers," IEEE JMEMS., vol. 8, no. 1, pp. 100-114, Mar. 1999.
7. E. Cianci, V. Foglietti, D. Memmi, G. Caliano, A. Caronti, and M. Pappalardo, "Fabrication of Capacitive Ultrasonic Transducers by a Low Temperature and Fully Surface-Micromachined Process," Precision Engineering, vol. 26, no. 4, pp. 347-354, 2002.
8. S. Panda, C. Daft, P. Wagner, I. Ladabaum, "Microfabfricated Ultrasonic Transducer (cMUT) Probes: Imaging Advantages Over PZT Probes," AIUM presentation, May 2003.