Comparison of piezoelectric (thickness mode) and MEMS transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1965-1974

  Gelly, J F ^a   Lanteri, F ^a  

^a Parallel Design SAS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTROACOUSTIC TRANSDUCERS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; PROJECT MANAGEMENT; RESEARCH AND DEVELOPMENT MANAGEMENT; THERMAL EFFECTS; THIN FILMS; ULTRASONIC TRANSDUCERS;

ACOUSTICAL MATHCHING; PIEZO-MATERIAL THICKNESS MODE SOLUTION (PTM); ULTRASOUND IMAGING;

PIEZOELECTRIC TRANSDUCERS;

EID: 4143068334     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

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