Influence of the N2 partial pressure on the mechanical properties and tribological behavior of zirconium nitride deposited by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 202, Issue 15, 2008, Pages 3653-3660

  Fragiel, A ^a,d   Staia, M H ^b   Munoz Saldana J ^c   Puchi Cabrera, E S ^b   Cortes Escobedo, C ^c   Cota, L ^d  

^a Instituto de Ingeniería   (Venezuela)

^b UNIVERSIDAD CENTRAL DE VENEZUELA   (Venezuela)

^c DEPARTAMENTO DE FÍSICA   (Mexico)

^d UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

316L substrate; N2 partial pressure; Nanoindentation; Sliding wear; ZrN PVD coatings

Indexed keywords

ELASTIC MODULI; FRICTION; HARDNESS; MAGNETRON SPUTTERING; NANOINDENTATION; NITRIDES; PARTIAL PRESSURE; REACTIVE SPUTTERING; STAINLESS STEEL; TRIBOLOGY; WEAR OF MATERIALS;

REACTIVE MAGNETRON SPUTTERING; SLIDING WEAR; ZIRCONIUM NITRIDE;

INORGANIC COATINGS;

ELASTIC MODULI; FRICTION; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; NANOINDENTATION; NITRIDES; PARTIAL PRESSURE; REACTIVE SPUTTERING; STAINLESS STEEL; TRIBOLOGY; WEAR OF MATERIALS;

EID: 41249102314     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.01.001     Document Type: Article

References (14)

1. Pichon L., Girardeau T., Straboni A., Lignou F., Guerin P., and Perriere J. Appl. Surf. Sci. 150 (1999) 115
2. Lopez G., and Staia M.H. Surf. Coat. Technol. 200 7 (2005) 2092
3. Benia H.M., Guemmaz M., Schmerber G., Mosser A., and Parlebas J.C. App. Surf. Sci. 200 (2002) 231
4. Zhiguo Z., Tianwei L., Jun X., Xinlu D., and Chuang D. Surf. Coat. Technol. 200 (2006) 4918
5. Pichon L., Girardeau T., and Straboni A. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 147 (1999) 378
6. Dauchot J.P., Edart S., Wautelet M., Wautelet M., and Hecq M. Vacuum 46 8-10 (1995) 927
7. Chhowalla M., and Emrah Unalan H. Nat. Mater. 4 (2005)
8. Benia H.M., Guemmaz M., Schmerber G., Mosser A., and Parlebas J.C. Appl. Surf. Sci. 211 (2003) 146
9. Yotsuya T., Yoshitake M., and Kodamat T. Cryogenics 37 (1997) 817
10. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
11. Chieh Y.-C., Lo W.-Z., and Lu F.-H. Surf. Coat. Technol. 200 (2006) 3336
12. Chudoba T., Schwarzer N., and Richter F. Thin Solid Films 355-356 (1999) 284
13. Berri{dotless}os-Orti{dotless}z J.A., La Barbera-Sosa J.G., Teer D.G., and Puchi-Cabrera E.S. Surf. Coat. Technol. 179 (2004) 145
14. Martinez E., Romero J., Lousa A., and Esteve J. Appl. Phys., A 77 (2003) 419