SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 200, Issue 10 SPEC. ISS., 2006, Pages 3336-3340

Microstructure evolution of ZrN films annealed in vacuum

(3) Chieh, Yu Chih a Lo, Wen Zheng a Lu, Fu Hsing a

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

Author keywords

Annealing; Microstructure; Stress; Young's Modulus; ZrN films

Indexed keywords

ANNEALING; ELASTIC MODULI; FILMS; INORGANIC COATINGS; MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

FIELD EMISSION SCANNING ELECTRON MICROSCOPY; LASER SCANNING CURVATURE MEASUREMENT; MICROSTRUCTURE EVOLUTION; UNBALANCED MAGNETRON SPUTTERING; ZIRCONIUM NITRIDE;

ZIRCONIUM COMPOUNDS;

EID: 31644433897 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.07.048 Document Type: Article

Times cited : (22)

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