Fabrication and characterization of silicon/silicon dioxide super lattices for silicon based light emitting devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6645, Issue , 2007, Pages

  Creazzo, Tim ^a   Marchena, Elton ^a   Redding, Brandon ^a   Hodson, Tim ^a   Prather, Dennis ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

Laser; PECVD; Photoluminescence; Photonics

Indexed keywords

LIGHT EMITTING DEVICES; NANOSCALE FABRICATION;

LIGHT EMITTING DIODES; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM CONFINEMENT; SILICA;

SUPERLATTICES;

EID: 41149160019     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.736242     Document Type: Conference Paper

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