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Microelectronics Reliability

Volumn 45, Issue 5-6, 2005, Pages 915-918

Light emission from Si/SiO2 superlattices fabricated by RPECVD

(5) Rolver R a Winkler, O a Forst M a Spangenberg, B a Kurz, H a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CHARGE CARRIERS; CRYSTALLIZATION; ELECTRIC POTENTIAL; LIGHT EMISSION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAPID THERMAL ANNEALING; SEMICONDUCTOR QUANTUM WELLS; SILICA; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY;

CAPACITANCE VOLTAGE (CV); RAMAN MICROSCOPY; REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (RPECVD); ROOM TEMPERATURE (RT);

SILICON;

EID: 14644406254 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/j.microrel.2004.11.025 Document Type: Conference Paper

Times cited : (22)

References (13)

1
- 0141775174
- L.T. Canham Appl. Phys. Lett. 57 1990 1046
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1046
- Canham, L.T.¹

2
- 0942266948
- J. Ruan, P.M. Fauchet, L. Dal Negro, M. Cazanelli, and L. Pavesi Appl. Phys. Lett. 83 2003 5479
- (2003) Appl. Phys. Lett. , vol.83 , pp. 5479
- Ruan, J.¹ Fauchet, P.M.² Dal Negro, L.³ Cazanelli, M.⁴ Pavesi, L.⁵

3
- 0000550145
- M. Fujii, M. Yoshida, S. Hayashi, and K. Yamamato J. Appl. Phys. 84 1998 4525
- (1998) J. Appl. Phys. , vol.84 , pp. 4525
- Fujii, M.¹ Yoshida, M.² Hayashi, S.³ Yamamato, K.⁴

4
- 1942508905
- M.J. Chen, J.L. Yen, J.Y. Li, J.F. Chang, S.C. Tsai, and C.S. Tsai Appl. Phys. Lett. 84 2004 2163
- (2004) Appl. Phys. Lett. , vol.84 , pp. 2163
- Chen, M.J.¹ Yen, J.L.² Li, J.Y.³ Chang, J.F.⁴ Tsai, S.C.⁵ Tsai, C.S.⁶

5
- 14644445500
- Boston V.I. Klimov Warrendale, PA; 2003
- Lockwood DJ, Dharma-Wardana MWC, Lu ZH, Grozea DH, Carrier P, Lewis LJ. In: Quantum Confined Semiconductor Nanostructures Symposium, Boston, 243, 2002, V.I. Klimov Warrendale, PA; 2003
- (2002) Quantum Confined Semiconductor Nanostructures Symposium , pp. 243
- Lockwood, D.J.¹ Dharma-Wardana, M.W.C.² Lu, Z.H.³ Grozea, D.H.⁴ Carrier, P.⁵ Lewis, L.J.⁶

6
- 0029775699
- D.J. Lockwood, Z.H. Lu, and J.M. Barribeau Phys. Rev. 76 1996 539
- (1996) Phys. Rev. , vol.76 , pp. 539
- Lockwood, D.J.¹ Lu, Z.H.² Barribeau, J.M.³

7
- 0000796314
- L. Khriatchev, O. Kilpelä, S. Karirinne, J. Keränen, and T. Lepistö Appl. Phys. Lett. 78 2001 323
- (2001) Appl. Phys. Lett. , vol.78 , pp. 323
- Khriatchev, L.¹ Kilpelä, O.² Karirinne, S.³ Keränen, J.⁴ Lepistö, T.⁵

8
- 79956033385
- M. Zacharias, J. Heitman, R. Scholz, U. Kahler, M. Schmidt, and J. Bläsing Appl. Phys. Lett. 80 2002 661
- (2002) Appl. Phys. Lett. , vol.80 , pp. 661
- Zacharias, M.¹ Heitman, J.² Scholz, R.³ Kahler, U.⁴ Schmidt, M.⁵ Bläsing, J.⁶

9
- 0031649644
- L. Heikkilä, T. Kuusela, H.P. Hedmann, and H. Ihantola Appl. Surf. Sci. 133 1998 84
- (1998) Appl. Surf. Sci. , vol.133 , pp. 84
- Heikkilä, L.¹ Kuusela, T.² Hedmann, H.P.³ Ihantola, H.⁴

10
- 0006631535
- P.D. Richard, R.J. Markunas, G. Lucovsky, G. Fountain, A.N. Mansour, and D.V. Tsu J. Vac. Sci. Technol. A3 1985 867
- (1985) J. Vac. Sci. Technol. , vol.3 , pp. 867
- Richard, P.D.¹ Markunas, R.J.² Lucovsky, G.³ Fountain, G.⁴ Mansour, A.N.⁵ Tsu, D.V.⁶

11
- 0034664594
- M. Zacharias, and P. Streitenberger Phys. Rev. B 62 2000 8391
- (2000) Phys. Rev. B , vol.62 , pp. 8391
- Zacharias, M.¹ Streitenberger, P.²

12
- 0000060393
- P.F. Trwoga, A.J. Kenyon, and C.W. Witt J. Appl. Phys. 83 1998 3789
- (1998) J. Appl. Phys. , vol.83 , pp. 3789
- Trwoga, P.F.¹ Kenyon, A.J.² Witt, C.W.³

13
- 0034664594
- M. Zacharias, and P. Streitenberger Phys. Rev. B 62 2000 8391
- (2000) Phys. Rev. B , vol.62 , pp. 8391
- Zacharias, M.¹ Streitenberger, P.²

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