Fluid-resistive bending sensor having perfect compatibility with flexible pneumatic balloon actuator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 615-618

  Kusuda, Shinya ^a   Sawano, Satoshi ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BALLOONS; BENDING (DEFORMATION); COMPOSITE MICROMECHANICS; FLUID MECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEDICAL APPLICATIONS; MEMS; MICROCHANNELS; MICROELECTROMECHANICAL DEVICES; PACKET NETWORKS; PHOTORESISTS; PNEUMATIC CONTROL EQUIPMENT; PNEUMATIC EQUIPMENT; PNEUMATICS; REACTIVE ION ETCHING; STIFFNESS;

FLUID-RESISTANCE; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; PNEUMATIC BALLOON;

SENSORS;

EID: 40949122668     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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