All PDMS pneumatic balloon actuators for bidirectional motion of micro finger

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 407-410

  Jeong, Ok Chan ^a   Kusuda, Shinya ^b   Konishi, Satoshi ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; MICROACTUATORS; POLYMERS; PRESSURE EFFECTS; SILICON COMPOUNDS; SWELLING;

BIDIRECTIONAL MOTION; MICROFINGERS; OUT-OF-PLANE MOTION; PDMS PNEUMATIC BALLOON ACTUATORS;

PNEUMATIC EQUIPMENT;

EID: 26844577300     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. J. Ok, N. Chu, and C. J. Kim, "Pneumatically Driven Microcage for Micro-Objects in Biological Liquid", Proc. IEEE MEMS'99, Orland, USA, Jan. 1999, pp. 459-463.
2. Y. Lu and C. J. Kim, "Characterization of Balloon-Jointed Micro-Fingers", Proc. IMECE'03, Washington D.C., USA, Nov. 15-21, 2003, IMECE2003-41326.
3. Y. Lu and C. J. Kim, "Micro-Finger Articulation by Pneumatic Parylene Balloons", Transducers'03, Boston, USA, June 8-12, 2003, pp. 276-279.
4. C. Grosjean, G. B. Lee, W. Hong, Y. C. Tai and C. M. Ho, "Micro balloon actuators for aerodynamic control", Proc. IEEE MEMS'98, Heidelberg, Germany, Jan. 1999, pp. 166-171.
5. F. Kawai, P. Cusin, and S. Konishi, "Thin Flexible End-Effector using Pneumatic Balloon Actuator", Proc. IEEE MEMS 2000, Miyazaki, Japan, Jan. 2000, pp. 391-396.
6. O. C. Jeong, S. W. Park, J. H. Pak, and S. S. Yang, "Fabrication of a Peristaltic PDMS Micropump", Eurosensors 2004, Rome, Italy, Sept. 13-15, 2004, B4-1.