Resonant sensors for microfluidic applications

Materials Research Society Symposium Proceedings

Volumn 951, Issue , 2006, Pages 173-178

  Niebelschütz, Florentina ^a   Tonisch, Katja ^a   Cimalla, Volker ^a   Brückner, Klemens ^a   Stephan, Ralf ^a   Hein, Matthias ^a   Schober, Andreas ^a   Ambacher, Oliver ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON RESONANCE; MICROFLUIDICS; PROPANOL; SILICON CARBIDE; VISCOSITY MEASUREMENT;

ALUMINUM NITRIDE; CLAMPED RESONATORS; PHYSICAL SENSORS; RESONANT SENSORS;

MICROSENSORS;

EID: 40949088244     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0951-e05-07     Document Type: Conference Paper

References (6)

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3. V. Cimalla, Ch. Foerster, F. Will, K. Tonisch, K. Brueckner, R. Stephan, M. Hein, O. Ambacher, App. Phys. Lett 88 (2006) 253501.
4. Ch. Foerster, V. Cimalla, K. Brueckner, V. Lebedev, R. Stephan, M. Hein, O. Ambacher, phys. stat. sol. (a), 202 (2005), 671.
5. K. Brueckner, Ch. Förster, K. Tonisch, V. Cimalla, O. Ambacher, R. Stephan, K. Blau, and M. A. Hein, Proc. 35th European Microwave Conference, Paris, (2005) 1531.
6. T. Ikehara, R. A. F. Zwijze, K. Ikeda, J. Micromen. Microeng., 11 (2001), 50.