Accurate estimation of low (< 10-8 Ω · cm2) values of specific contact resistivity

IEEE Electron Device Letters

Volumn 29, Issue 3, 2008, Pages 259-261

  Bhaskaran, Madhu ^a   Sriram, Sharath ^a   Holland, Anthony S ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

Contact resistance; Cross Kelvin resistor (CKR); Specific contact resistivity (SCR)

Indexed keywords

NANOSTRUCTURES; OHMIC CONTACTS; RESISTORS;

ACCURATE ESTIMATION; ACCURATE TEST STRUCTURES; CROSS KELVIN RESISTOR; SPECIFIC CONTACT RESISTIVITY;

CONTACT RESISTANCE;

EID: 40749114820     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2007.915378     Document Type: Article

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