A highly sensitive capacitive-type humidity sensor using customized polyimide film without hydrophobic elements

Sensors and Materials

Volumn 16, Issue 3, 2004, Pages 109-117

  Kim, Yong Ho ^a   Kim, Yong Jun ^a   Lee, Jun Young ^a   Kim, Jung Hyun ^a   Shin, Kyu Ho ^b  

^a Yonsei University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Capacitive humidity sensor; Customized polyimide film; Hydrophobic; Micropackage

Indexed keywords

EID: 4043092679     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

1. th International Conference on Microelectromechanical Systems 2001 (IEEE, Interlaken, 2001) p. 18.
2. W. Qu, W. Wlodarski, R. Green, M. Austin and K. Galatsis: International Conference on Optoelectronic and Microelectronic Materials Devices 1998 (IEEE, Perth, 1998) 158.
3. T. Nitta and S. Hayakawa: IEEE Trans. CPMT 3 (1980) 237.
4. M. Dokmeci and K. Najafi: J. MEMS 10 (2001) 197.
5. U. Kang and K. D. Wise: IEEE Trans. Elec. Dev. 47 (2000) 702.
6. Y. Y. Qui, C. Azeredo-Leme, L. R. Alcacer and J. E. Franca: Sensors and Actuators A 92 (2001) 80.
7. C. Laville and C. Pellet: IEEE Sensors J. 2 (2002) 96.
8. D. D. Denton, C. N. Ho and S. He: IEEE Trans. Inst. Meas. 39 (1990) 508.
9. H. Shibata, M. Ito, M. Askursa and K. Watanabe: IEEE Trans. Inst. Meas. 45 (1996) 564.
10. M. Penza and V. I. Anisimkin: Sensors and Actuators A 76 (1999) 162.
11. G. Maier: Prog. Polym. Sci. 26 (2001) 3.
12. J. O. Simpson and A. K. St. Clair: NASA Tech. Rep. (1997)
13. H. Han, H. Chung, C. C. Gryte, T. J. Shin and M. Ree: Polymer 40 (1999) 2681.
14. J. Seo, A. Lee, C. Lee and H. Han: J. Appl. Polym. Sci. 76 (2000) 1315.