Study on the nanoindentation VIA atomic force microscope and molecular dynamics simulation

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 40, Issue 6, 2004, Pages 39-44

  Huo, Dehong ^a   Liang, Yingchun ^a   Cheng, Kai ^a   Dong, Shen ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Mechanical properties; Molecular dynamics; Nanoindentation; Thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; ELASTIC MODULI; MOLECULAR DYNAMICS; NANOTECHNOLOGY; PLASTIC DEFORMATION; VAPOR DEPOSITION;

AMORPHOUS TRANSFORMATION; MECHANICAL PROPERTIES ANALYSIS; VACUUM VAPOR DEPOSITION;

THIN FILMS;

EID: 4043068460     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/jme.2004.06.039     Document Type: Article

References (14)

1. Li J C M. Impression creep and other localized tests. Materials Science and Engineering A, 2002, 322(1,2): 23-42
2. Chudoba T, Richter F. Investigation of creep behaviour under load during indentation experiments and its influence on hardness and modulus results. Surface and Coatings Technology, 2001, 148(2,3): 191-198
3. Li X, Bhushan B. Micro/nanomechanical characterization of ceramic films for microdevices. Thin Solid Films, 1999, 340(1,2): 210-217
4. Digital Instruments Inc. Support note no.225, Rev F, Santa Barbara, CA 1998
5. Knapp J A, Follstaedt D M, Myers S M, et al. Finite-element modeling nanoindentation for evaluating mechanical properties of MEMS materials. Surface and Coatings Technology, 1998, 103-104: 268-275
6. Pethica J B, Huntchings R, Oliver W C. Hardness measurements at penetration depths as small as 20 nm. Philosophical Magazine A, 1983, 48(4): 593-606
7. Doerner M F, Nix W D. A method for interpreting the data from depth-sensing indentation instruments. Journal of Material Research, 1986, 1(4): 601-609
8. Doerner M F, Nix W D. A method for interpreting the data from depth-sensing indentation instruments. Journal of Material Research, 1986, 1(4): 601-609
9. Briscoe B J, Sebastian K S, Sinha S K. Application of the compliance method to microhardness measurements of organic polymers. Philosophical Magazine, 1996, A74: 1159-1169
10. Rafii-Tabar H. Modelling the nano-scale phenomena in condensed matter physics via computer-based numerical simulations. Physics Reports, 2000, 325(6): 239-310
11. Nose S. Constant temperature molecular dynamics methods. Progress Theory Physical Supplement, 1991, 103: 1-46
12. Smithells C J. Metals Reference Book. London: Butterworths, 1983
13. Jamting A K, Bell J M, Swain M V, et al. Investigation of the elastic modulus of thin films using simple biaxial bending techniques. Thin Solid Films, 1997, 308-309 (1-4): 304-309
14. Nix W D, Gao H. Indentation size effects in crystalline materials: a law for strain gradient plasticity. Journal of the Mechanics and Physics of Solids, 1998, 46(3): 411-425