Temporal development of ion beam mean charge state in pulsed vacuum arc ion sources

Review of Scientific Instruments

Volumn 79, Issue 2, 2008, Pages

  Oks, E M ^a,b   Yushkov, G Yu ^b   Anders, A ^c  

^a TOMSK STATE UNIVERSITY OF CONTROL SYSTEMS AND RADIOELECTRONICS   (Russian Federation)

^b INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ION BEAMS; METAL IONS;

ARC CURRENT; CHARGE STATE; VACUUM ARC ION BEAM;

ION SOURCES;

EID: 40149092943     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2801094     Document Type: Article

References (9)

1. The Physics and Technology of Ion Sources, 2nd revised and extended ed., edited by, I. Brown, (Wiley-VCH, New York, 2004), Chap..
2. I. Brown and E. Oks, IEEE Trans. Plasma Sci. ITPSBD 0093-3813 33, 1931 (2005).
3. H. Reich, P. Spadtke, and E. M. Oks, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1150268 71, 707 (2000).
4. A. Anders and G. Y. Yushkov, Appl. Phys. Lett. APPLAB 0003-6951 91, 091502 (2007).
5. A. Anders, E. M. Oks, and G. Y. Yushkov, J. Appl. Phys. JAPIAU 0021-8979 102, 043303 (2007).
6. I. G. Brown, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1144756 65, 3061 (1994).
7. V. I. Gushenets, A. G. Nikolaev, E. M. Oks, L. G. Vintizenko, G. Yu. Yushkov, A. Oztarhan, and I. G. Brown, Rev. Sci. Instrum. RSINAK 0034-6748 77, 063301 (2006).
8. R. A. MacGill, M. R. Dickinson, A. Anders, O. R. Monteiro, and I. G. Brown, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1148718 69, 801 (1998).
9. G. Y. Yushkov and A. Anders, IEEE Trans. Plasma Sci. ITPSBD 0093-3813 10.1109/27.669634 26, 220 (1998).