Finite element analysis of thermal stress in magnetron sputtered Ti coating

Journal of Materials Processing Technology

Volumn 200, Issue 1-3, 2008, Pages 205-211

  Chawla, Vipin ^a   Jayaganthan, R ^a   Chandra, Ramesh ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

Author keywords

FEM; Shear stress; Thermal stress; Ti coating

Indexed keywords

COATED MATERIALS; FINITE ELEMENT METHOD; GLASS; MAGNETRON SPUTTERING; THERMAL STRESS;

DEPOSITION TEMPERATURE; GLASS SUBSTRATES; QUADRATIC ELEMENTS; RADIAL STRESSES;

TITANIUM;

EID: 39849103434     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.09.036     Document Type: Article

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