Tensile testing of microfabricated thin films

Microsystem Technologies

Volumn 3, Issue 3, 1997, Pages 117-121

  Ogawa, H ^a   Suzuki, K ^c   Kaneko, S ^b   Nakano, Y ^c   Ishikawa, Y ^a   Kitahara, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

^c SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011181995     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050067     Document Type: Article

References (5)

1. Ogawa H; Ishikawa Y; Kitahara T (1994) Micro tensile testing of small-sized thin sheet metals. Proc. 2nd Japan-France Congress on Mechatronics, Vol. 2, Takamatsu, Japan, November 1-3, pp. 465-468
2. Ogawa H; Ishikawa Y; Kitahara T (1995) Measurements of stress-strain diagrams on micro materials by a developed tensile machine. Prepr. 73rd JSME Fall Annual Meeting, Vol. I, Fukuoka, Japan, September 11-13, pp. 360-361
3. Ishikawa Y; Ogawa H; Kitahara T; Ooyama N (1995) Evaluation of micro motion mechanism. Proc. 1st International Micromachine Symposium, Tokyo, Japan, November 1-2, pp. 89-92
4. Lyman WS; Wilson DH (1979) Pure metals - Titanium (Ti). In: Metals Handbook Ninth Edition, Vol. 2, pp. 814-816. Metals Park, American Society for Metals
5. Hunsicker HY; Mondolfo LF; Tomblin PA (1979) Pure metals - Aluminum (Al). In: Metals Handbook Ninth Edition, Vol. 2, pp. 714-715. Metals Park, American Society for Metals