Development of highly-functional ceramic materials by chemical vapor deposition

Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

Volumn 54, Issue 12, 2007, Pages 863-872

  Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Functional ceramics; High deposition rate; Laser CVD; Plasma CVD; Thermal CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DETERIORATION; THICK FILMS; TITANIUM COMPOUNDS; YTTRIA STABILIZED ZIRCONIA;

FUNCTIONAL CERAMICS; HIGH DEPOSITION RATE;

CERAMIC MATERIALS;

EID: 39749116395     PISSN: 05328799     EISSN: None     Source Type: Journal    
DOI: 10.2497/jjspm.54.863     Document Type: Article

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