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Volumn 48, Issue 1, 2007, Pages 58-63

Microstructures and electrical properties of Ru-C nano-composite films by PECVD

(3) Sakata, Masato a Kimura, Teiichi a Goto, Takashi a

Author keywords

Impedance spectroscopy; Interfacial conductivity; Oxygen sensor; Plasma enhanced chemical vapor deposition; Ruthenium carbon nano composite

Indexed keywords

AC IMPEDANCE SPECTROSCOPY; RUTHENIUM-CARBON NANO-COMPOSITE;

AGGLOMERATION; ELECTRIC PROPERTIES; METALLIC FILMS; MICROSTRUCTURE; NANOCOMPOSITES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLID ELECTROLYTES; YTTRIA STABILIZED ZIRCONIA;

RUTHENIUM COMPOUNDS;

EID: 33847715146 PISSN: 13459678 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans.48.58 Document Type: Article

Times cited : (4)

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