Microspectrometer based on a tunable optical filter of porous silicon

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 52-59

  Lammel, G ^a   Schweizer, S ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

Electropolishing; Microspectrometer; Porous silicon; Surface micromachining; Tunable optical filter

Indexed keywords

COLORIMETRY; ELECTROLYTIC POLISHING; INFRARED RADIATION; LIGHT TRANSMISSION; MICROACTUATORS; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; POROUS SILICON; REFRACTIVE INDEX; SPECTROMETERS; THICKNESS MEASUREMENT; TUNING;

MICROSPECTROMETER; TUNABLE OPTICAL FILTER; TUNABLE OPTICAL INTERFERENCE FILTER;

OPTICAL FILTERS;

EID: 0035426201     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00539-8     Document Type: Article

References (10)

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10. Using apodization functions to reduce sidelobes in rugate filters