Diamond growth in a direct-current low-pressure supersonic plasmajet

Diamond and Related Materials

Volumn 6, Issue 2-4, 1997, Pages 406-410

  Laimer, J ^a   Pauser, H ^a   Stori H ^a   Haubner, R ^a   Lux, B ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Diamond growth; Direct current low pressure supersonic plasmajet; Molybdenum plate

Indexed keywords

EID: 0001461904     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00589-4     Document Type: Article

References (15)

1. N. Ohtake and M. Yoshikawa, J. Electrochem. Soc., 137 (1990) 717.
2. K. Kurihara, K. Sasaki, M. Kawarada and N. Koshino, Appl. Phys. Lett., 52 (1988) 437.
3. R. Furukawa, H. Uyama, and O. Matsumoto, IEEE Trans. Plasma Sci., 18 (1990) 930.
4. S. Matsumoto, I. Hosoya, and T. Chounan, Jpn. J. Appl. Phys., 29 (1990) 2082.
5. Z.P. Lu, L. Stachowicz, P. Kong, J. Heberlein, and E. Pfender, Plasma Chem. Plasma Process., 11 (1991) 387.
6. D.G. Goodwin, J. Appl. Phys., 74 (1993) 6888.
7. D.G. Goodwin, J. Appl. Phys., 74 (1993) 6895.
8. S.W. Reeve, W.A. Weimer and F.M. Cerio, J. Appl. Phys., 74 (1993) 7521.
9. M.H. Loh and M.A. Cappelli, Surf. Coat. Technol., 54/55 (1992) 408.
10. M.H. Loh and M.A. Cappelli, Diamond Relat. Mater., 2 (1993) 454.
11. M.A. Cappelli and M.H. Loh, Diamond Relat. Mater., 3 (1994) 417.
12. M.E. Coltrin and D.S. Dandy, J. Appl. Phys., 74 (1993) 5803.
13. D.S. Dandy and M.E. Coltrin, Appl. Phys. Lett., 66 (1995) 391.
14. D.S. Dandy and M.E. Coltrin, J. Mater. Res., 10 (1995) 1993.
15. H. Pauser, C.G. Schwärzler, J. Laimer and H. Störi, Plasma Chem. Plasma Process, (in press).