Effect of interstitial C incorporation on the Raman scattering of Si1-x-y Gex Cy epitaxial layer

Applied Physics Letters

Volumn 92, Issue 6, 2008, Pages

  Choi, Suk ^a   Kim, Hyun Woo ^a   Kim, Hee Jin ^a   Hong, Sukwon ^a   Lee, Gun Do ^a   Yoon, Euijoon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SUBSTITUTION REACTIONS;

PHONON FREQUENCY CALCULATION; ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION;

EPITAXIAL LAYERS;

EID: 39349106833     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2842419     Document Type: Article

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