Dependence of pyrocarbon microstructure on the substrate and annealing during the initial stage of chemical vapor deposition

Carbon

Volumn 46, Issue 2, 2008, Pages 236-244

  De Pauw, V ^a   Hawecker, J ^a   Schneider, R ^a   Send, W ^a   Wang, X L ^a   Gerthsen, D ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRON MICROSCOPES; ELECTRON SPECTROSCOPY;

ISLAND DENSITIES; PYROCARBON MICROSTRUCTURE;

MICROSTRUCTURE;

EID: 39149144013     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2007.11.009     Document Type: Article

References (21)

1. Oberlin A. Pyrocarbons (Review). Carbon 40 1 (2002) 7-24
2. Delhaes P. Chemical vapor deposition and infiltration processes of carbon materials (Review). Carbon 40 5 (2002) 641-657
3. Dong G.L., and Hüttinger K.J. Consideration of reaction mechanisms leading to pyrolytic carbon of different textures. Carbon 40 14 (2002) 2515-2528
4. Hu Z.J., Zhang W.G., Hüttinger K.J., Reznik B., and Gerthsen D. Influence of pressure, temperature and surface area/volume ratio on the texture of pyrolytic carbon deposited from methane. Carbon 41 4 (2003) 749-758
5. Bruneton E., Nancy B., and Oberlin A. Carbon-carbon composites prepared by a rapid densification process II: structural and textural characterizations. Carbon 35 10-11 (1997) 599-611
6. Gerthsen D., Bach D., Kalhöfer S., De Pauw V., Reznik B., and Send W. Structural properties of the fiber-matrix interface in carbon-fiber/carbon-matrix composites and interfaces between carbon layers and planar substrates. Int J Mat Res 97 7 (2006) 1052-1058
7. Bouchard E., Lavenac J., Roux J.C., Langlais F., and Delhaes P. Pyrocarbon deposits on a graphite surface observed by STM. Adv Mater CVD 7 3 (2001) 125-130
8. De Pauw V., Collin A., Send W., Hawecker J., Gerthsen D., Pfrang A., et al. Deposition rates during the early stages of pyrolytic carbon deposition in a hot-wall reactor and the development of texture. Carbon 44 14 (2006) 3091-3101
9. Thamm T., Baumann W., Dietrich D., Meyer N., Stöckel S., and Marx G. Preparation of boron nitride thin films by microwave PECVD and their analytical characterization. Phys Chem Chem Phys 3 23 (2001) 5150-5153
10. Reznik B., and Hüttinger K.J. On the terminology for pyrolytic carbon. Carbon 40 4 (2002) 621-624
11. Reznik B., Gerthsen D., and Hüttinger K.J. Micro- and nanostructure of the carbon matrix of infiltrated carbon fiber felts. Carbon 39 2 (2001) 215-229
12. Bravman J.C., and Sinclair R. The preparation of cross-section specimens for transmission electron microscopy. J Electron Microsc Tech 1 1 (1984) 53-61
13. Bourrat X., Trouvat B., Limousin G., Vignoles G., and Doux F. Pyrocarbon anisotropy as measured by electron diffraction and polarized light. J Mater Res 15 1 (2000) 92-100
14. Rosenauer A., Remmele T., and Gerthsen D. Atomic scale strain measurements by the digital analysis of transmission electron microscopic lattice images. Optik 105 3 (1997) 99-107
15. Energy-filtering transmission electron microscopy. In: Reimer L. (Ed). Springer Series in Optical Sciences vol. 71 (1994), Springer
16. Schneider R., Woltersdorf J., and Lichtenberger O. ELNES across interlayers in SiC (Nicalon) fibre-reinforced Duran glass. J Phys D 29 7 (1996) 1709-1715
17. Lavenac J., Langlais F., Bourrat X., and Naslain R. Deposition process of laminar pyrocarbon from propane. J Phys IV France 11 P3 (2001) 1015-1021
18. Reznik B., Norinaga K., Gerthsen D., and Deutschmann O. The effect of cooling rate on hydrogen release from a pyrolytic carbon coating and its resulting morphology. Carbon 44 7 (2006) 1330-1334
19. 6 system. J Mater Sci 34 9 (1999) 2189-2192
20. Lander J.J., and Morrison J. Low voltage electron diffraction study of the oxidation and reduction of silicon. J Appl Phys 33 6 (1962) 2089-2092
21. Gelain C., Cassuto A., and Le Goff P. Kinetics and mechanisms of low-pressure, high-temperature oxidation of silicon. Oxid Met 3 2 (1971) 139-151