Preparation of boron nitride thin films by microwave PECVD and their analytical characterisation

Physical Chemistry Chemical Physics

Volumn 3, Issue 23, 2001, Pages 5150-5153

  Thamm, T ^a   Baumann, W ^a   Dietrich, D ^a   Meyer, N ^a   Stockel S ^a   Marx, G ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORIC ACID; BORON DERIVATIVE; BORON NITRIDE; UNCLASSIFIED DRUG;

AIR; ANALYTIC METHOD; ARTICLE; CHEMICAL COMPOSITION; CHEMICAL PARAMETERS; CHEMICAL PROCEDURES; FILM; GAS; HUMIDITY; HYDROLYSIS; MICROWAVE RADIATION; STRUCTURE ANALYSIS; TECHNIQUE; TEMPERATURE DEPENDENCE;

EID: 0035669216     PISSN: 14639076     EISSN: None     Source Type: Journal    
DOI: 10.1039/b106220b     Document Type: Article

References (15)