IR laser-induced co-decomposition of gaseous trisilane and carbon disulfide

Journal of Analytical and Applied Pyrolysis

Volumn 81, Issue 2, 2008, Pages 231-236

  Pola, Josef ^a   Pokorná, Dana ^a   Šubrt, Jan ^b   Papagiannakopoulos, Panos ^c  

^a INSTITUTE OF CHEMICAL PROCESS FUNDAMENTALS   (Czech Republic)

^b INSTITUTE OF INORGANIC CHEMISTRY   (Czech Republic)

^c UNIVERSITY OF CRETE   (Greece)

Author keywords

Carbon disulfide; Co thermolysis; Laser induced polymers; Polysiloxanes; Polysilthianes; Thiocarbosiloxanes; Trisilane

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INFRARED DEVICES; LASER BEAM EFFECTS; POLYMER FILMS; SCANNING ELECTRON MICROSCOPY; SILICONES;

POLYSILTHIANES; THIOCARBOSILOXANES; TRISILANE; VOLATILE PRODUCTS;

CARBON DISULFIDE;

EID: 39149127000     PISSN: 01652370     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jaap.2007.11.009     Document Type: Article

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