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Volumn 689, Issue 16, 2004, Pages 2697-2701
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IR laser decomposition of 1,3-disilacyclobutane in presence of carbon disulfide: Chemical vapour deposition of polythiacarbosilane
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Author keywords
1,3 disilacyclobutane; Carbon disulfide; Chemical vapour deposition; Laser induced decomposition; Polythiacarbosilane
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Indexed keywords
CARBON;
CARBON DISULFIDE;
CYCLOBUTANE DERIVATIVE;
HYDROGEN;
ORGANOSILICON DERIVATIVE;
OXYGEN;
SILANE DERIVATIVE;
SILICON;
SULFUR;
AIR;
ARTICLE;
ATMOSPHERIC DEPOSITION;
CARBON DIOXIDE LASER;
CHEMICAL BOND;
COMPLEX FORMATION;
CONTROLLED STUDY;
DECOMPOSITION;
FILM;
GAS;
HYDROLYSIS;
INFRARED RADIATION;
POLYMERIZATION;
SOLID STATE;
VAPOR;
SILENE;
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EID: 4043165515
PISSN: 0022328X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jorganchem.2004.04.051 Document Type: Article |
Times cited : (7)
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References (26)
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