Ordered nanostructures array fabricated by nanosphere lithography

Journal of Alloys and Compounds

Volumn 452, Issue 2, 2008, Pages 473-477

  Zhang, Yongjun ^a   Wang, Xianghe ^b   Wang, Yaxin ^a   Liu, Huilian ^a   Yang, Jinghai ^a  

^a JILIN NORMAL UNIVERSITY   (China)

^b TONGHUA TEACHERS COLLEGE   (China)

Author keywords

Nanofabrications; Nanostructured materials

Indexed keywords

LITHOGRAPHY; METALLIC FILMS; NANOPARTICLES; NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES;

ETCHING PROCESS; NANOSPHERE LITHOGRAPHY; NANOSTRUCTURES ARRAY; SILICON-BASED NANOHOLES; SODIUM DODECYL SULFATE;

NANOSPHERES;

EID: 39149084014     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2007.11.021     Document Type: Article

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