Computer simulation and optimization of properties of porous low-k dielectrics

Materials Science- Poland

Volumn 25, Issue 4, 2007, Pages 1193-1202

  Elsner, A ^a   Hermann, H ^a  

^a IFW DRESDEN   (Germany)

Author keywords

Computer simulation; Dense random sphere packings; Low k dielectrics; Porous structure

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; MECHANICAL PROPERTIES; OPTIMIZATION; PERMITTIVITY;

DENSE RANDOM SPHERE PACKINGS; LOW-K DIELECTRICS; POROUS STRUCTURE;

POROUS MATERIALS;

EID: 39049132940     PISSN: 01371339     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (9)

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